ZYGO 8020-0237-01 | 0090-A6270 | ZMI 501A | Measurement Electronics Module

ZYGO 8020-0237-01 | 0090-A6270 | ZMI 501A | Measurement Electronics Module.The ZYGO ZMI 501A is a high-accuracy, multi-channel, fiber-based displacement/distance measuring interferometer system designed for precision metrology applications. It is part of Zygo Corporation’s product line, which specializes in nano-position sensors and displacement measuring interferometers. The ZMI 501A, specifically, is a 2-channel system with physical characteristics including a weight of 2 lb (1 Kg), cable clearance of 5 inches (127 mm) at both ends, and power requirements of +5.2 VDC with a current of 3.3 A. It is designed to operate within an environmental range of 0 to 40°C in non-condensing conditions, ensuring reliable performance under various temperature conditions.

The ZMI 501A offers impressive measurement capabilities, with each board capable of handling 2 axes. It boasts a minimum optical input power of 8 µW and a linearity accuracy of 1.3 LSB at 3V. For serial data, the position resolution can reach a maximum of O/512 (1.24 nm), with a position range of ± 10.6 m and a maximum target mirror velocity of 475 mm/sec. The data rate is selectable from 3 to 24 MHz. These specifications make the ZMI 501A suitable for applications requiring high precision and stability, such as wafer stages, stacked stage systems, reticle stages, gantry systems, and steering mirrors.（You may also need:ZYGO 7702 Laser Head）

Zygo Corporation provides a variety of accessories and custom interferometer designs to complete the measurement system, including standard fold mirrors, beamsplitters, fiber optic pickups, and fiber cables for flexible configuration. Their custom designs allow for consolidated beam delivery and reduced alignment time, facilitating faster integration during production. This system is particularly useful in OEM applications where space is at a premium and rapid integration is required.